IDEA #5FL253 Nondestructive Method For Selective In-depth Layer Diagnosis Of Defects

Areas of Application Research equipment engineering, nanoindustry, and microelectronics Specifi cation Sensitivity to defects (by concentration or volume share) is 10–8-10–6 Advantages The method enables diagnosis without damaging the research object; an increase in sensitivity to the structural defects by 4-6 orders of magnitude; simultaneous determination of many structural parameters; layer-by-layer determination of structure with a nanosize pitch; identifi cation of structural changes as a result of rapid-going processes; use of simplifi ed techniques Stage of Development. Suggestions for Commercialization IRL3, TRL3 Vending of patent under license agreement IPR Protection IPR2