Gallium oxide films for sensing gas comprise Ga2O3 and have a porosity of at least about 30%. Such films can be formed by coating a substrate with a solution comprising: a gallium salt and a porogen comprising an organic compound comprising a hydrophilic chain and a hydrophobic chain; and heating the substrate to a temperature in the range from about 400° C. to about 600° C. while exposing the substrate to an oxygen-containing source to convert the gallium salt to a gallium oxide.
https://app.acclaimip.com/pdf/E8xGJM8uUSidzEZBKi5RJPatJrm4pfqNn74gtxI/US7547953B2
For more information or to license this innovation:
- Log In
to view the innovation's details
- Sign Up
with discount code "ECOS"
