A method for inspecting an object using a light measurement system that includes a light source and an imaging sensor. The method includes emitting light from the light source, dispersing light emitted from the light source into one of a diffraction pattern and an interference pattern, and imaging the patterned light onto the object using a lens.
https://app.acclaimip.com/pdf/LpzhfGyUMEP6nOEZiZQwT5HMO8PWO5DB_XvT9y8/US7492450B2
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